Capable of vertically stacking up to 4 horizontal processing tubes. A general-purpose
system that can utilize the installation area effectively.

Features . Outline

Model 200 Series Horizontal Furnaces for Mass Production and Experiments

From small experiments and research (R&D) to
mass production, these furnaces can be designed
to meet users' needs.
These horizontal furnaces can be used for solar
battery and photovoltaic power system (PV)
production as well as silicon wafers.

• • From experimental usage to mass production, various equipment
    　 configuration is available
  • Batch: 25 to 150 wafers processing is available
  • 1 to 4 stacks furnace configuration is implemented to take advantage of
    　 limited square available
  • 2- to 8-inch wafer sizes are available
  • Various equipment configuration is proposed according to the customer’s
    　 needs based on usage, space, and budget

　

Model 206A Horizontal Furnace for PV Production

This horizontal furnace is suitable for solar battery
and photovoltaic (PV) cell production. 100 to 156
square wafers can be mass-processed in a batch
of 200 to 400 wafers each.

　

• • No. 1 share in domestic market
  • Handles 100- to 156-mm square wafers
  • Batch: 200 to 400 wafers processing is available (depends on flat zone length
    　 and wafer pitch)
  • Fast heating up and cooling down, reduced power using our original heater