Heat Treatment Equipment for Semiconductor Manufacturing｜Product

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Heat Treatment Equipment for Semiconductor Manufacturing

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Heat Treatment Equipment for Semiconductor Manufacturing

Heat Treatment Equipment for Semiconductor Manufacturing

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We provide heat treatment equipment indispensable for the manufacturing process of compound power semiconductors such as Si and SiC/GaN/Ga2O3, MEMS, solar cells,
VCSELs, and OLEDs.

Heat Treatment Equipment for Semiconductor Manufacturing

Vertical furnace

Ideal for applications such as oxidation, diffusion, LPCVD and annealing

Horizontal furnace

Furnaces equiped with horizontal processing tubes

Lamp annealing system

Using multiple halogen lamps as heat sources, wafers can be heat-treated in a short time with high accuracy.

Clean oven system

An optimal convection heating system for polyimide post-processing (back end process) and resist curing.

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Heat Treatment Equipment for Semiconductor Manufacturing

Heat Treatment Equipment for Semiconductor Manufacturing

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