Features . Outline

IR Furnace, Single Substrate Transfer Type CCBS – IR series

The CCBS-IR series are single substrate transfer type clean
ovens that utilize an IR heating system.
They can perform a variety of heat treatments for large-size
liquid-crystal (LCD) and organic EL (OLED) up to 10th
generation.
A demonstration model that processes IGZO and LTPS (low
temperature polysilicon) at 500°C is also available.

• • High-level clean factor
  • High heating efficiency
  • Excellent temperature uniformity
  • Capable of atmosphere control