Clean oven, single substrate transfer type CCBS series

Best-seller clean ovens for liquid crystal (LCD) and organic EL (OLED)

IR furnace, single substrate transfer type CCBS-IR series

Single substrate transfer type clean ovens that utilize an IR heating system.

Roller hearth continuous furnace RH series

Continuous furnace equiped with special ceramics roller as the transfer roller

Cleanbatch system CBS series

Standard batch type clean oven ideal for LTPS (low temperature polysilicon) processing.

Walking beam type continuous clean oven WB series

A walking-beam system with superior clean performance is adopted for transport inside the oven.