Features . Outline

Clean Batch System CBS series

Batch type clean oven ideal for LTPS (low temperature polysilicon) processing.

• • Our proprietary seal structure allows anti-oxidation treatment by charging inert gas.
    
  • An ultra high-temperature HEPA filter allows maximum operating temperature
    　 of 500°C.
  • The adoption of an oven forced cooling mechanism and faster substrate transfer
    　 enables high throughput.
  • Cleanliness: Class 10 (Class 10 (0.3μm)