JTEKT ENGINEERING JOURNAL

Return to top

PDF（97 KB）

No.1014E 2017Special Edition on Automotive Bearing Technologies Development of Thermal Processing Tool for Minimal Fab

Category TECHNICAL REPORT
Author S. SUZUKI
Product Development Dept., Koyo Thermo Systems Co., Ltd.
Abstract Minimal Fab is a new semiconductor manufacturing system that is specialized for small lot production, advocated by the National Institute of Advanced Industrial Science and Technology (AIST). The project has been proceeding so smoothly that developers have demonstrated the manufacture of transistors at an exhibition venue1). Koyo Thermo Systems currently participates in the project and is in charge of the thermal processing tool. In this report, we introduce the details of the development of the tool.
Keyword Minimal Fab, semiconductor manufacturing equipment, resistance furnace, energy saving
Search tag

Download Ranking of
ENGINEERING JOURNAL

1

No.1019E 2023 Special Edition on Automotive Technologies Development of Steer-by-Wire System (J-EPICS) with No Mechanical Link

2

No.1013E 2016 Special Edition on Steering and Drive Unit Technologies High Pressure Hydrogen Valve and Regulator

3

No.1018E 2022 Special Edition on Industry Related Technologies Development of a Low-Torque Electric Oil Pump for Cooling of BEV Motors

4

No.1019E 2023 Special Edition on Automotive Technologies Future Prospects: A New Era from Power Assist Steering to Smart Steering

5

No.1019E 2023 Special Edition on Automotive Technologies Pairdriver™ Steering Collaborative Control for Automated Driving

6

No.1019E 2023 Special Edition on Automotive Technologies Simulation of Meshing Rack and Pinion for Steering Systems

7

No.1013E 2016 Special Edition on Steering and Drive Unit Technologies Development of High Pressure Hydrogen Regulator for Fuel Cell Vehicles

8

No.1019E 2023 Special Edition on Automotive Technologies Sophistication and Efficiency of Functional Safety Activity by Applying Systems Engineering

9

No.1019E 2023 Special Edition on Automotive Technologies MCU with JFOPS4 for Electric Power Steering

10

No.1019E 2023 Special Edition on Automotive Technologies Technical Trends and Outlook for Automotive Driveline System for Electrification

Summary:4,2024
1

No.1019E 2023 Special Edition on Automotive Technologies Development of Steer-by-Wire System (J-EPICS) with No Mechanical Link

2

No.1019E 2023 Special Edition on Automotive Technologies Future Prospects: A New Era from Power Assist Steering to Smart Steering

3

No.1019E 2023 Special Edition on Automotive Technologies MCU with JFOPS4 for Electric Power Steering

4

No.1019E 2023 Special Edition on Automotive Technologies Bearing Technology Trends and Prospects with the Electrification of Automobiles

5

No.1019E 2023 Special Edition on Automotive Technologies Technical Trends and Outlook for Automotive Driveline System for Electrification

6

No.1019E 2023 Special Edition on Automotive Technologies Kinematic Analysis and Design of Suspension-steering Mechanisms for Vehicles

7

No.1019E 2023 Special Edition on Automotive Technologies Pairdriver™ Steering Collaborative Control for Automated Driving

8

No.1019E 2023 Special Edition on Automotive Technologies Development of Grease-lubricated High-speed Bearing

9

No.1019E 2023 Special Edition on Automotive Technologies Simulation of Meshing Rack and Pinion for Steering Systems

10

No.1013E 2016 Special Edition on Steering and Drive Unit Technologies High Pressure Hydrogen Valve and Regulator

Summary:5,2023-4,2024