No.1014E 2017Special Edition on Automotive Bearing Technologies Development of Thermal Processing Tool for Minimal Fab

Author S. SUZUKI
Product Development Dept., Koyo Thermo Systems Co., Ltd.
Abstract Minimal Fab is a new semiconductor manufacturing system that is specialized for small lot production, advocated by the National Institute of Advanced Industrial Science and Technology (AIST). The project has been proceeding so smoothly that developers have demonstrated the manufacture of transistors at an exhibition venue1). Koyo Thermo Systems currently participates in the project and is in charge of the thermal processing tool. In this report, we introduce the details of the development of the tool.
Keyword Minimal Fab, semiconductor manufacturing equipment, resistance furnace, energy saving
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