Based on our experience, know-how and improvement technologies cultivated in the
manufacture of mass production equipment, we also offer design and manufacture of
semi custom order electric furnaces that can meet a wide range of needs in testing
and development workplaces. With our proven and reliable technologies, we will
provide various solutions in response to customer requests such as treatment in
hydrogen atmospheres or wet atmospheres, adding vacuum control mechanisms,
or other needs.

Features . Outline

Vacuum Purge Type Small Box Furnace μBF

These box furnaces are able to use vacuum purge to
rapidly change the atmosphere inside the furnace.
Also capable of treatment in reducing atmospheres.
Used for degreasing and firing of various ceramics,
firing of electronic components, and other purposes.

• Heat treatment in various atmospheres is available including reducing atmosphere
  

　

Small Type Conveyor Furnace 810 series

These compact conveyor furnaces for experiments (R&D)
are fully equipped to support all kinds of atmospheres in
which electronic components are manufactured
including air, N₂, and hydrogen (reducing) atmospheres.
The purge chambers installed at the entrance and exit
allow excellent stability and reproducibility of the
　　　　　　　　　　　　　　atmosphere inside the furnace.

• Compact with small footprint
• Ideal for small-lot production of multiple product types.
• The adoption of a muffle allows continuous treatment in various atmospheres.
• Maintainability is improved by one-touch open/close covers.
• Includes a touch panel.
• Includes a weekly timer as standard.
• Compact furnace size

　

Vacuum Bake Furnace

Capable of high-grade treatment under reduced pressure
with uniform temperature profiles and precision control
of three individual zone heaters.
Suitable for purposes such as hard baking of polyimides,
drying of plastic packages, and wafer drying and baking.

• Excellent temp. distribution through 3-zone temp. control

　

High-Tempe Atmosphere Box Furnace

Capable of high-temperature treatment in all kinds of atmospheres
including nitrogen (N2), hydrogen, and vacuum.
Can be used for a wide range of applications including firing of
non-oxide ceramics, metallizing of electronic components, and
melting metals.

• Normal operating temperature range: 800°C to 1600°C
  　 (The upper limit temperature varies depending on the atmosphere.)

　

Vacuum Purge Type Box Furnace ΜB series

With rapid pump-down performance, gas change to
a nitrogen (N₂) atmosphere can be completed in a
short time.
These are multipurpose heat treatment furnaces that
are suitable for production of LTCC substrates and MLCC.

• With large internal capacity and high efficiency, this series can also be used
  　 for production.
• Capable of treatment in various atmospheres.
• Can be used as a reducing atmosphere furnace or vacuum furnace (max. 600°C).
• A Moldatherm® heater is used for superior energy savings and good maintainability.
• Can also be used for small-lot production.