No.1007E 2010 Development of High-Precision Air Bearing Spindle

Category TECHNICAL PAPER
Author R. TANASE
Mechatronic Systems R&D Dept., Research & Development Center
K. OHTSUBO
Future technology for next product & Process innovation R&D Dept., Research & Development Center
F. SUGIMOTO
Mechatronic Systems R&D Dept., Research & Development Center
Abstract We have developed a high-precision air bearing spindle capable of reducing spindle run-out in the axial direction to a few nanometers. Regarding radial bearings, changing the conventional structure has improved stiffness, and regarding axial bearings, an actuator was added to dampen axial-direction vibrations and decrease axial runout. A spindle incorporating these radial and axial bearings was designed, and characteristics were confirmed by numerical analysis. Furthermore, a prototype was manufactured, and performance was validated through experiments. Performance was shown to be superior to that of the conventional spindle.
Keyword air bearing spindle, axial run-out, actuator, control, bearing stiffness, machine tool
Reference

M. HIRANO, T. MURAKAMI, M. ABE : Developments in Technologies for Ultra-Precision Machining, Toyoda Koki Technical Review, Vol.45, No.3, (2005) 1.(in Japanese)

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