No.1008E 2011 Deposition Technology and Applications of DLC Films |
| Category | TECHNICAL REPORT |
|---|---|
| Author | M. SUZUKI Material Engineering R&D Dept., Research & Development Center, Doctor of Engineering K. YAMAKAWA Material Engineering R&D Dept., Research & Development Center T. SAITO Material Engineering R&D Dept., Research & Development Center, Doctor of Engineering |
| Abstract | Diamond-Like Carbon (DLC) films possess good properties such as low friction, high wear resistance, high hardness, smooth surfaces, and chemical stability. DLC fi lms have been used widely in industrial applications as protective and lubricating fi lms for sliding parts. However, the properties of DLC fi lms are known to depend upon the deposition methods and conditions. The JTEKT Group supplies DLC fi lms produced by the plasma enhanced chemical vapor deposition (PE-CVD) method, which has the advantage of making it possible to deposit on threedimensional surfaces. This report introduces the deposition methods, properties and some application examples of DLC fi lms. |
| Keyword | diamond-like carbon (DLC), chemical vapor deposition (CVD), deposition method, application |
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