No.1012E 2015Industry Related Technologies Special Edition Development of a Long Life and High Corrosion-resistant Bearing for Film Manufacturing Equipment

Category TECHNICAL REPORT
Author K. OKUDA J. MATSUNAMI
Industrial Machinery Application Engineering Dept., Bearing Operations Headquarters
Abstract Productivity in every industrial field is improving continuously. The productivity of semiconductors or liquid crystal fi lms manufactured in extreme environments, such as vacuums, clean environments, and high temperatures, is also growing. We explain the material and the lubrication used in corrosive environments. In addition, we introduce the development of the corrosion-resistant bearing used in fi lm manufacturing equipment. We succeeded in developing a bearing using steel with high hardness and high corrosion resistance. The new steel has higher corrosion resistance than the existent steel, enables a signifi cant reduction in bearing wear and gives the bearing a long wear life.
Keyword film manufacturing equipment, chemical solution, corrosion resistance, hardness, wear, EXSEV bearing
Reference

JTEKT CORPORATION : CERAMIC BEARINGS AND EXSEV BEARINGS FOR EXTREME SPECIAL ENVIRONMENTS, CAT. No. B2004E-2 (2014).
KOYO SEIKO CO., LTD. : Selection and Application of Materials for Bearings in Special Environment, Koyo Engineering Journal No. 145 (1994) 34.(in Japanese)

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