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No.1022E 2026Special Edition on the Technologies that Support Manufacturing and Manufacturing Equipment Development of Heat Treatment Equipment for SiC Power Semiconductors

Category TECHNICAL REPORT
Author T. DAITO　K. AOYAGI
Semiconductor & Scientific Equipment Dept., JTEKT THERMO SYSTEMS CORPORATION
Abstract SiC power semiconductors are attracting significant attention as next-generation power conversion devices. JTEKT THERMO SYSTEMS CORPORATION provides a range of furnaces designed for SiC-specific processes, including activation, oxynitridation, and contact annealing. These furnaces can perform high-temperature processing of SiC semiconductors, enhancing manufacturing efficiency and reducing costs. This report outlines the technical features and advantages of the activation annealing furnace.
Keyword heat treatment, activation annealing, SiC power semiconductors, vertical furnaces
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