No.1018 2021インダストリー関連技術特集号 半導体製造装置向け特殊環境用軸受の開発技術動向 |
| カテゴリー | 資料 |
|---|---|
| 筆者 | 産機・軸受技術本部 産業機器技術部 木村和博 |
| 要旨 | In line with technological progress of recent years, the environment and conditions in which rolling bearings are used are becoming increasingly advanced and diversifi ed year by year. Bearings are being required to perform in harsher operating conditions, such as special environments with high temperature, vacuum, cleanliness, and corrosiveness. Since developing vacuum bearings (silver ion plate bearings) in 1978, JTEKT has studied lubricants and bearing materials while promoting the development of the EXSEV (Extreme Special Environment) bearing series that supports various special environments in order to keep pace with cutting-edge technical fi elds. Many bearings are exposed to diverse and harsh special environments during the semiconductor manufacturing process in particular. This paper will highlight the needs of each operating environment for the main manufacturing processes and the JTEKT bearings that support such needs. |
| キーワード | semiconductors, vacuum, clean, high temperatures, corrosive, solid lubricant, EXSEV |
| 関連リンク | 株式会社ジェイテクト： 特殊環境用軸受シリーズ EXSEV軸受・セラミック軸受, CAT. No.BA004AJA-1DS. |
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